Lectures & Labs

Knowledge gained through the Nanofab Short Course’s lecture topics are reinforced through real-time design and fabrication experiences. Labs afford attendees the opportunity to gain crucial hands-on experience.

Lectures

• Cleanroom operations and laboratory and chemical safety
• General process flow and design methodology
• Photolithography and maskless/direct-write lithography
• Additive and subtractive manufacturing technologies
• CAD design tutorial for photomasks
• Wafer bonding, thinning, and polishing
• Wafer-level and advanced packaging

Labs

• Metrology techniques including optical inspection, thin-film measurement and characterization and contact/non-contact profilometry
• Wet and dry (plasma) etching
• Thin-film deposition using Chemical and Physical Vapor Deposition (CVD/PVD) techniques
• Hierarchical design and mask design using GDSII design tools
• Mask making and UV photolithography using mask aligner and/or stepper lithography
• Grinding and polishing
• Electrical test and characterization

Some activities will simulate processes due to time constraints.