Nanofab Short Course
Lectures & Labs
Knowledge gained through the Nanofab Short Course’s lecture topics are reinforced through real-time design and fabrication experiences. Labs afford attendees the opportunity to gain crucial hands-on experience.
Lectures
- Cleanroom operations and laboratory and chemical safety
- General process flow and design methodology
- Photolithography and maskless/direct-write lithography
- Additive and subtractive manufacturing technologies
- CAD design tutorial for photomasks
- Wafer bonding, thinning, and polishing
- Wafer-level and advanced packaging
Labs
- Metrology techniques including optical inspection, thin-film measurement and characterization and contact/non-contact profilometry
- Wet and dry (plasma) etching
- Thin-film deposition using Chemical and Physical Vapor Deposition (CVD/PVD) techniques
- Hierarchical design and mask design using GDSII design tools
- Mask making and UV photolithography using mask aligner and/or stepper lithography
- Grinding and polishing
- Electrical test and characterization
Some activities will simulate processes due to time constraints.